Rebuilt Osaka TG2003M Turbo Pump & Controller, VAT

Posted by:

testeqe

Location:

Arizona

Ad Status:

SOLD

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Description:

Refurbished Osaka TG2003M Magnetic Suspended Compound Molecular Pump with TD2000 Controller & VAT Valve

This a refurbished system that was sitting in stock for a company that refurbished Lam Research and Matrix System tools that is close to going bankrupt. The manual says the controller is a TD2000 but I could not read the serial number tag due to how it is packaged.

The Pump's Serial Number Tag Reads:
Model Number: TG2003M
Serial Number: G2000M-90 (The -90 part was hard to read because of packaging and might be slightly off)
Date of Manufacture: 02-1995 (The date was hard to read because of packaging as well, it could have been 1996)

The Controller's Hour Meter Reads: 0.0 Hours

The Lam Research Tag Reads:
Part Number: 796-092516R003 (R meaning Rebuilt)
# Pump, Seiko Seiki, 2000 LTR, STPH2000 w/Controller (The Osaka is a direct replacement but the tag reads Seiko Seiki)
# Date: 08/02/2004

Items In the Crate:
# Osaka TG2003M Turbo Pump
# Osaka TD2000 Controller
# Osaka Pump to Controller Cable
# VAT Valve (Believed to be a 200mm F64 Series Flange

Turbo Pump Specifications:
Volume Flow Rate:
N2: 2000 l/s
H2: 1600 l/s
Maximum Compression Ratio (Measured)1):
N2: 108
H2: 4 x 103
Ultimate Pressure (After Baking): 10-10 Torr (10-9 Pa)
Maximum Backing Pressure: 2 Torr (260 Pa)
Rotor Speed: 400 S-1 (24,000 rpm)
Start-up Time in Vacuum: 10 min.
Shutdown Time in Vacuum (with Brake): 10 min.
Bearing System: Active 5-axis control magnetic bearing
Permissible Baking Temperature at Inlet: 120°C max.
Installation Position: In any position
Weight (Without Power Supply): 70 kg. (does not include packaging either)
Cooling: Air-cooling
Ambient Temperature for Guaranteeing Ultimate Pressure: 10 ~ 23°C
Permissible Ambient Temperature: 10 ~ 40°C
Notes:
1): Maximum measured value
2): Backed with two-stage oil-sealed rotary pump
3): Gas purging function provided as standard

Power Supply Specifications:
Model: TD2000
Applicable Pump: TG2000M/2003M
Input Power: 200/220 VAC, ±10%, Single-phase
Maximum Input Current: 7 A
Frequency: 400 Hz
Permissible Ambient Temperature (With No Condensation): 0 ~ +40°C
Weight: 35 kg. (does not include packaging for shipping)