Refurbished Osaka TG2003M Magnetic Suspended Compound Molecular Pump with TD2000 Controller & VAT Valve
This a refurbished system that was sitting in stock for a company that refurbished Lam Research and Matrix System tools that is close to going bankrupt. The manual says the controller is a TD2000 but I could not read the serial number tag due to how it is packaged.
The Pump's Serial Number Tag Reads:
Model Number: TG2003M
Serial Number: G2000M-90 (The -90 part was hard to read because of packaging and might be slightly off)
Date of Manufacture: 02-1995 (The date was hard to read because of packaging as well, it could have been 1996)
The Controller's Hour Meter Reads: 0.0 Hours
The Lam Research Tag Reads:
Part Number: 796-092516R003 (R meaning Rebuilt)
# Pump, Seiko Seiki, 2000 LTR, STPH2000 w/Controller (The Osaka is a direct replacement but the tag reads Seiko Seiki)
# Date: 08/02/2004
Items In the Crate:
# Osaka TG2003M Turbo Pump
# Osaka TD2000 Controller
# Osaka Pump to Controller Cable
# VAT Valve (Believed to be a 200mm F64 Series Flange
Turbo Pump Specifications:
Volume Flow Rate:
N2: 2000 l/s
H2: 1600 l/s
Maximum Compression Ratio (Measured)1):
N2: 108
H2: 4 x 103
Ultimate Pressure (After Baking): 10-10 Torr (10-9 Pa)
Maximum Backing Pressure: 2 Torr (260 Pa)
Rotor Speed: 400 S-1 (24,000 rpm)
Start-up Time in Vacuum: 10 min.
Shutdown Time in Vacuum (with Brake): 10 min.
Bearing System: Active 5-axis control magnetic bearing
Permissible Baking Temperature at Inlet: 120°C max.
Installation Position: In any position
Weight (Without Power Supply): 70 kg. (does not include packaging either)
Cooling: Air-cooling
Ambient Temperature for Guaranteeing Ultimate Pressure: 10 ~ 23°C
Permissible Ambient Temperature: 10 ~ 40°C
Notes:
1): Maximum measured value
2): Backed with two-stage oil-sealed rotary pump
3): Gas purging function provided as standard
Power Supply Specifications:
Model: TD2000
Applicable Pump: TG2000M/2003M
Input Power: 200/220 VAC, ±10%, Single-phase
Maximum Input Current: 7 A
Frequency: 400 Hz
Permissible Ambient Temperature (With No Condensation): 0 ~ +40°C
Weight: 35 kg. (does not include packaging for shipping)
Company: MHz Electronics, Inc. Contact Name: Michael Finkelstein Status:Premium Member
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About this Osaka Vacuum / VAT TG2003M, TD2000, 64 Series Valve listing - This is a for sale classified ad for a used, surplus or second hand Osaka Vacuum / VAT TG2003M, TD2000, 64 Series Valve equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this Osaka Vacuum / VAT TG2003M, TD2000, 64 Series Valve listing or view this user's member profile for detailed contact info.
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