ATMI SemiChem 4102 DSP Chemical Analyzer

Posted by:

testeqe

Location:

Arizona

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Active

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Description:

ATMI SemiChem 4102 (SC4102) DSP Analyzer

The unit powers up but we do not have anyway to test it after that. It is sold as-is. This unit came from a SEZ Plant that closed down in Arizona. They make etching systems. We can pull apart the two units and ship them separate from the 19" rack if you would like.

The Main Unit's Serial Number Tag Reads:
Model Number: SC4102
Part Number: 4102-110-0000
Serial Number: LE-01069
Power Requirements: 110/220V, Single Phase, 50/60 Hz, .5/1 A
CE Marked: Yes

The Controller's Serial Number Tag Reads:
Model Number: SC4102
Part Number: 4102-110-0000
Serial Number: LE-01070
Power Requirements: 110/220V, Single Phase, 50/60 Hz, .5/1 A
CE Marked: Yes

Process Types:
# Wet-Etch
# Cleans
# Nitride Etch
# Piranha Etch
# HF
# Tungsten CMP
# Copper CMP

Advantages:
# Increased tool throughput
# Decreased chemical costs
# Real-time process monitoring
# Insurance against batch loss

Product Features:
# 4 4...20 mA Analog Outputs
# 6 Programmable Alarm Relays
# Bi-Directional RS-232 Serial Interface
# Dual Sample Points
# High Dilution Measuring Cell
# 4 Digital Burettes
# Reagent Cabinet
# Reagent Level Sensing
# Semi S2 and S8
# CE

Description:
The SemiChem 4102 offers process engineers the accuracy, reliability, and flexibility for a higher degree of efficiency and consistency to meet today's demands for higher yield and zero-defect tolerance.

Quantitative chemical concentration is obtained with the SemiChem. Full on-line chemical monitoring allows real time bath correction of bath composition and therefore stable control of the process condition; product consistency is maintained.

Product yields are increased when a quantitative bath composition is known. Variations that can affect product quality are immediately apparent and can be quickly corrected before loss of product quality.

Applications for the SemiChem 4102 include cleaning, etching, & CMP processes. Long-term bath analysis characterizes bath behavior and allows the end-user to extend bath life, reduce chemical costs, and improve tool throughput. Each factor can allow for significant tool cost of ownership improvements. The SemiChem 4102's value can be maximized by having up to 2 baths monitored by a single SemiChem in various bath configurations.

Integration of the SemiChem is simple and straightforward. The SemiChem can be installed with an existing tool; integration and communication readily available facilities and dry contact handshaking. Analysis information can be transmitted either from analog or digital signals. In many cases, the SemiChem may be offered as an integrated chemical monitoring OEM system.