Advanced Energy RFG 5500 13.56 MHz RF Generator

Posted by:

testeqe

Location:

Arizona

Ad Status:

SOLD

Manufacturer:

Type:

Model:

Year (or range of years):

Condition:

Price (in US dollars):

Quantity:

Type of Seller:

Description:

Refurbished: Advanced Energy RFG 5500 5kW 13.56 MHz RF Generator with Setpoint Tracking F47 (Novellus PN: R27-156754-00)

We have 2 units available, only 1 sold in the auction. They are refurbished by Advanced Energy.

Description:
The Advanced Energy, Inc. (AE) model RFG 5500 generator, product is a 13.56 MHz RF generator designed to regulate its output power based on forward power. The RFG 5500 generator will provide up to 5000 watts into a 50-Ohm, non-reactive load. This particular RFG-5500 generator includes a clamp circuit to guarantee the RF output will be less than one watt if the requested setpoint is zero. This generator also provides "setpoint tracking" that allows the RF output to closely track the user's setpoint for controlled ramping.

The RFG 5500 option 115 is designed to meet the SEMI F47-0200 specification for semiconductor processing equipment voltage sag immunity. The generator will maintain full functionality throughout any single F47 event, with no loss of setpoint. The unit is controlled through a 15 pin analog/digital user port. There is no operator control panel provided on this unit. A numeric display and eight status LEDs are visible from the front of the unit for monitoring the generator functions. The RFG 5500 generator provides common exciter (CEX) operation allowing two or more generators to be frequency locked to each other and/or to a common system clock.

The RFG 5500 generator is designed for 19-inch rack mounting with a panel height of 7 inches. AC power for the RFG 5500 generator is to be supplied from a 4 wire (3 phase with ground), 208 VAC (nominal), 47 to 63 Hz. power source. No neutral connection is required. The unit is water cooled with no provisions or requirements for forced air cooling.