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NEW Brooks Automation VCE 6 200mm Vacuum Casette Elevator / Load Lock
2 units available, only 1 sold in the auction. These are believed to be part number: 003-9300-93 according to the paperwork. They were made for ASM and were spare stock surplus from ASM in Arizona.
Setup According to Paperwork:
Date: 3/24/00
Part Number: 003-9300-93
Revision: 1
VCE 6 Type: Auto Door/AGV Arm
Item Type: AM350
Customer: ASM
Drive Assembly Part Number: 003-9010-03 (Revision: A)
Prom, VCE Firmware Version: 5.33
MCC2A Board: 002-1100-10 (Revision: A6)
VCE 6 Load Locks:
The VCE 6 Vacuum Cassette Elevator load lock provides cost effective, state-of-the-art factory interfacing for up to 200mm size, SEMI standard wafer cassettes. The modular VCE 6 has an automatically actuated door, an isolated drive mechanism, and a chamber configured for a flush, clean room wall interface.
The VCE 6 is designed for ultra clean and reliable operation with full environmental isolation ranging from 10-6 scale high vacuum to just above atmospheric pressure. Integral, intelligent sensing capabilities include wafer position in cassette, wafer protruding out of cassette, and cassette on platform.
The VCE 6 comes in four styles:
VCE 6 L - Cassette Buffer Load Station w/Cassette Transfer Arm (This is believed to be the style according to the paperwork):
# Enables AGV, RGV, or human operator transfer of cassettes to and from a permanent, rigid platform that is external to the load lock, with unobstructed overhead access.
VCE 6 E - Ergonomic Tilt Platform and cassette guide:
# Enables convenient operator loading and unloading of cassettes in the near horizontal position, external to the load lock. Servo controlled motion ensures wafer safety and cleanliness.
VCE 6 C - Cassette Transfer Arm platform
# Enables unobstructed overhead access and is designed for AGV, RGV, or human operator factory interface.
VCE 6 F - Fixed Cassette Platform:
# Designed for operator loading and unloading of cassettes.
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