BOC Edwards Helios-4 Exhaust Gas Abatement System

Posted by:

testeqe

Location:

Arizona

Ad Status:

SOLD

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Description:

BOC Edwards Helios-4 Gas Abatement System

This unit came out of Intel surplus and was last demoed in 08. It was being used on an ASM Epsilon 3000 Reactor System with an SiGe Epitaxy process. We do not have the expertise to test it and are selling it as-is.

The Unit's Serial Number Tag Reads:
Part Number: Y120B4002
Serial Number: 016938791
Date of Manufacture: 2001
Weight: 510 kg.
Power Requirements: 120 V, Single Phase, 60 Hz

Brief Description:
Effective exhaust management of CVD processes must be able to handle the deposition gases and the associated powders. The fluoride wastes from cleaning gases also require suitable treatment along with global warming gases. Abatement systems must be able to comply with these requirements in one complete unit.

Features and Benefits:
# Proven high abatement performance for toxic, pyrophoric & corrosive gases
* Reliable handling of associated powders
# Controlled and complete oxidation of hydrogen to safe limits
* Capable of handling up to 200 lpm of hydrogen
# Up to 4 process inlets

Applications:
# Si Epitaxy
# III-V MOCVD
# SiGe Epitaxy