These units are used and may need a rebuild. They are sold as-is. Previous use is believed to be on a Novellus sputtering system. It has an 8" ConFlat Flange (24 small holes - hole size: 7/16" dia approx., 8" inner diameter, 10" outer diameter
On-Board® Cryopump Description:
# CTI-Cryogenics' pioneering cryopumps with fully integrated controls and supporting peripherals speeds integration and system operation
# Consistent process performance
# Higher tool productivity via significantly increased cryopump uptime
# Regenerates in half to one-third the time of a typical Cryo-Torr® cryopump application
# Fast Regen™ capability extends cryopump performance between regenerations
# Simultaneous regeneration capability, enabled by networking your cryopumps, speeds overall system regeneration, increasing tool uptime
# GOLDLink® compatible for productivity protection 24/7, worldwide
# Backed by legendary Helix service and support, worldwide
On-Board cryogenic vacuum pumps incorporate embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability. On-Board solutions include sophisticated software and easy-to-use graphical user interfaces to significantly improve the performance and operation of the cryopump. Today, the On-Board Cryopump is the standard of the world for reliability and performance.
On-Board Cryopumps provide clean, reliable, high-speed pumping for critical vacuum process applications, ensuring high product yields and process throughputs. They are available in a complete range of sizes to fit any application requirement.
Specifications:
Pumping Speed:
Hydrogen: 2200 l/s
Air: 1500 l/s
Water Vapor: 4000 l/s
Argon: 1200 l/s
Capacity (std. liter):
Argon: 1000
Hydrogen (5x10-6 Torr): 12
Nominal Regeneration Time (cold to cold):
First & Second Stage: 2.5 hrs
Second Stage: <1 hr
Company: MHz Electronics, Inc. Contact Name: Michael Finkelstein Status:Premium Member
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Ad Number: 144804
About this CTI Helix / Brooks Automation On-Board 8F w/ACM (P300) listing - This is a for sale classified ad for a used, surplus or second hand CTI Helix / Brooks Automation On-Board 8F w/ACM (P300) equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this CTI Helix / Brooks Automation On-Board 8F w/ACM (P300) listing or view this user's member profile for detailed contact info.
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