Manufacturer: |
CTI Helix / Brooks Automation |
Type: |
Cryopump - 300mm PVD Advanced Vacuum |
Model: |
On-Board 8F w/ACM (P300) |
Year (or range of years): |
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Condition: |
As-is |
Price (in US dollars): |
USD |
Quantity: |
Multiple |
Type of Seller: |
Dealer Owner |
|
Description: |
| |
|
CTI Helix / Brooks Automation PN: 8116081G005 On-Board 8F Cryopump w/ACM - P300 300mm PVD Advanced Vacuum System
These units are used and may need a rebuild. They are sold as-is. Previous use is believed to be on a Novellus sputtering system. It has an 8" ConFlat Flange (24 small holes - hole size: 7/16" dia approx., 8" inner diameter, 10" outer diameter
On-Board® Cryopump Description:
# CTI-Cryogenics' pioneering cryopumps with fully integrated controls and supporting peripherals speeds integration and system operation
# Consistent process performance
# Higher tool productivity via significantly increased cryopump uptime
# Regenerates in half to one-third the time of a typical Cryo-Torr® cryopump application
# Fast Regen™ capability extends cryopump performance between regenerations
# Simultaneous regeneration capability, enabled by networking your cryopumps, speeds overall system regeneration, increasing tool uptime
# GOLDLink® compatible for productivity protection 24/7, worldwide
# Backed by legendary Helix service and support, worldwide
On-Board cryogenic vacuum pumps incorporate embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability. On-Board solutions include sophisticated software and easy-to-use graphical user interfaces to significantly improve the performance and operation of the cryopump. Today, the On-Board Cryopump is the standard of the world for reliability and performance.
On-Board Cryopumps provide clean, reliable, high-speed pumping for critical vacuum process applications, ensuring high product yields and process throughputs. They are available in a complete range of sizes to fit any application requirement.
Specifications:
Pumping Speed:
Hydrogen: 2200 l/s
Air: 1500 l/s
Water Vapor: 4000 l/s
Argon: 1200 l/s
Capacity (std. liter):
Argon: 1000
Hydrogen (5x10-6 Torr): 12
Nominal Regeneration Time (cold to cold):
First & Second Stage: 2.5 hrs
Second Stage: <1 hr
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