Manufacturer: |
CTI Helix / Brooks Automation |
Type: |
Cryopump - Cryo Vacuum Pump |
Model: |
On-Board 250F, PN: 8116152G001 |
Year (or range of years): |
2005 |
Condition: |
New or like-new |
Price (in US dollars): |
USD |
Quantity: |
Multiple |
Type of Seller: |
Dealer Owner |
|
Description: |
| |
|
NEW CTI On-Board 250F Cryopump with a FastRegen Ion Implantation Module
These units are brand new or were refurbished by CTI/Brooks Automation. They are in excellent condition. They were off the shelf spares from Intel surplus. This unit had a service date of 3/17/2005.
The Unit's Serial Number Tag Reads:
Part Number: 8116152G001
Serial Number: C05310541
CE Marked: Yes
Specifications:
Configuration: Flat
Vacuum Flange ID: 250 mm (Metal Seal, ANSI, and ISO)
Gas Pumping Speeds:
Water: 6,500 Liters/Sec.
Air: 2,200 Liters/Sec.
Hydrogen: 3,200 Liters/Sec.
Argon: 1,800 Liters/Sec.
Gas Capacities:
Hydrogen: 16 Standard Liters
Argon: 1,000 Standard Liters
Throughput:
Argon: 700 Sccm (9 Torr-Liters/Sec.)
Crossover: 150 Torr-Liters
Full Regeneration (Typical): < 3.3 hrs
Fast Regeneration (Typical): < 1.5 hrs
Cryopump Weight: 58 lbs. (26 Kg)
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