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The following list represents sputtering targets available for the Varian M2000 sputtering system:
* Ta - 5% Al (3N purity), New, Size M, Type Quantum, Al alloy support
* Al - 5% Ti, Used, Size M, Type Quantum, Al alloy support
* Al - 0.5% Zr, Used, Size M, Type Quantum, Al alloy support
* Zr, Used, Size M, Type Quantum, Al alloy support
* 10% Ti - W, Used, Size M, Type Quantum, Cu support
* Al - Si - Cu, Used, Size M, Type Quantum, Al alloy support
* Si - B (6N purity), Used, Size M, Type Quantum, Cu support
* Ge (5N purity), Used, Size M, Type Quantum, Cu support
* Cu, Used, Size M, Type Quantum, Al alloy support
* W, Used, Size M, Type Quantum, Cu support
* Al - 1% Si, Used, Size M, Type Quantum, Al alloy support
* Al - Ti, Used, Size M, Type Quantum, Al alloy support
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