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Brooks Automation / Progressive Technologies SENTRY 9000 Automated Exhaust Flow Controller for Wafer Track Systems
The units is believed to be new, old stock off the shelf. The controller portion has spots that look like water spots on the pressure transmitter portion.
The Sentry 9000's Serial Number Tag Reads:
Product: Sentry 9000
Type: Automated
Part Number: 11951G01
Revision: 3
Serial Number: 0602-11069
Operating Range: 4 - 35 SCFM (110 - 990 SLM)
Accuracy to Set Point: ±5%
Minimum House Exhaust: 2.5" (64 mm H2O)
With Booster Fan: 0.75" (19 mm H20)
CE Marked: Yes
The Tool Interface Module's Serial Number Tag Reads:
Product: TIM-100
Part Number: 12042
Revision: 02
Serial Number: 18543
Power Requirements: +15 to +24 VDC, 650 mA, -15 to -24 VDC, 50 mA
Set Point Control Types:
# 0 to 5 Volt Analog
# RS 422/485 Serial Interface
# Stand alone using operator keypad
The unit is configured with parameters for a Sentry 9000 35CFM
Description:
The SENTRY 9000 Automated Exhaust Controller, with the TIM (Tool Interface Module), is ideal for tracks with lower flow requirements, such as some SVG tracks. Multiple set-point capability allows different flows for different steps in the process or for different processes. Constant, stable exhaust reduces splashback. The SENTRY 9000 also effectively isolates the chamber from the effects of other chambers, so there is no cross-talk. For DUV processing, the SENTRY 1000 prevents the backstreaming of contaminants that desensitize DUV resist. Reduced splashback and chamber isolation combine to reduce wafer contamination and reduce resist sensitivity.
The optional Fast Set Point feature enables the exhaust controller to change set point in less than 0.5 seconds. By learning stepper motor positions for recipe set point, the TIM commands the stepper motor to the last good position, for a rapid transition from one set point to another. In case of drift or changing system dynamics, the software is adaptive, recognizing and recording the new position for future use.
Primary Applications:
# Coat
# Develop
# Hot Plates
Specifications:
Flow Rate Range: 4 - 35 CFM (113 - 991 LPM)
Input O.D.: 3" (76 mm)
Output O.D.: 4" (102 mm)
Exhaust Required (without booster fan): Minimum 2.5" of water column for maximum flow rate (622 Pa)
Accuracy to Set Point: ±5%
Response Time to Fluctuation: 50 milliseconds to fluctuations of 100%
Materials: Teflon, Stainless Steel, Aluminum, Polyethylene, Epoxy
Controller Dimensions: 11.33" L x 8.00" W x 11.84" H (288 mm x 203 mm x 301 mm)
TIM Dimensions: 8.32" L x 5.41" W x 2.33" H (211 mm x 137 mm x 59 mm)
Controller Weight: 22 lbs. (10.0 kg)
TIM Weight: 2 lbs. (.9 kg)
Power Options: DC Supply: +15 to +24 VDC, 650 mA and -15 to -24 VDC, 50 mA
Control Types:
# 0-5 Volt Analog
# RS422/485 at 9600 baud
# Stand Alone Operator Keypad
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