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NEW in Box: Leybold/Inficon Transpector 2 Residual Gas Analysis System with a H100M Sensor (FC/EM)
Can Be Used on Applied Materials Parts (AMAT):
AMAT Part Number: 0550-01011
AMAT Description: Analy, RGA Transpector Hi Performance Sensor
Additional Information:
# Transpector 2 Controller, Model Number TSPTT100
# H100M Sensor (FC/EM), Part Number: 10231
# Heater Jacket, 117 Volts 65 Watts, Low Temp: 100�C High Temp: 250�C, Part Number: 900-066-P4
# Cables, Part Numbers: 900-040-G3 & 600-1003-P1
# Ship Kit (May be an inclusive part number that includes items already listed or listed below), Part Number: 911-203-G3
# Operation Manual
# RS-485 Adapter
# Sensor Calibration Sheet
# Flange Extension Kit, Part Number: 900-041-G3
# Flange Extension Kit (Leybold) See, Part Number: 900-041-G3
# Power Supply & Power Cord, Part Number: 911-039-G1, Rev E.
Specifications:
Sensor Length (Vacuum Side): 10.4" (26.4 cm)
Mass Range: 1 to 100 amu
Detector Type: EM/FC
Resolution: < 1 amu wide @ 10% peak height over the entire mass range (per 1993 AVS Recommended Practice)
Temperature Coefficient: < 1% of peak height per degree C (for FC Only) - (during an 8-hour period, after a half hour warm-up)
Sensitivity:
FC: 1 x 10-4 amps/Torr (7.6 x 10-5 mbar/Torr)
EM: 500 amps/Torr (380 mbar/Torr)
Minimum Detectable Partial Pressure1:
FC: N/A
EM: 5 x 10-15 Torr (6.6 x 10-15 mbar)
Zero Blast Interference at Mass 2: < 100 ppm
Maximum Operating Pressure: 5 x 10-4 Torr (6.6 x 10-4 mbar)
Maximum Sensor Operating Temperature:
FC: 250�C
EM: 150�C
Maximum Bakeout Temperature (electronics removed): 350�C
Operating Temperature: 20�C to 50�C ambient
Power Input: 20 to 30 V DC, 9-pin male "D" connector, internally isolated from system ground
RS232 Serial Communications Interface: Nonisolated, baud selection 1200 through 9600, 9-pin female "D" connector, TxD, RxD, CTS, DTR
RS485 Addressable Communications Interface: Isolated, 4-wire, 57,600 baud fixed, half duplex, global address @ 0, fixed address 1 of 31, 9-pin female "D" connector, +TxD, -TxD, +RxD, -RxD
Relay Outputs: 4 relays, 24 V at 0.5 amps (1 for operational status, 3 for setpoint limits)
Inputs: 2 nonisolated TTL inputs, contact closure (1 for remote emission on, 1 for remote emission off); 2 differential analog inputs, 0 to 10 V DC
Electronics Enclosure: Drip-resistant
User-Configured Switches: 8-position DIP Switch - 5 positions: device address (1 of 31); Primary Link SElect (RS232/485); 2 positions: baud rate
LED Indicators (green): 1 for CPU status, 1 for emission status
Note 1: Minimum detectable partial pressure is calculated as the standard deviation of the noise (minimum detectable signal) divided by the sensitivity of the sensor (FC or EM) measured at a four-second dwell time.
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