Brooks Automation Sentry 1510 Pressure Control Sys

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testeqe

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Arizona

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SOLD

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NEW Brooks Automation / Progressive Technologies SENTRY 1510 Automated Process Pressure Control System


Main Unit's Serial Number Tag Reads (The one with the silver-colored hose):
Product: Sentry 1510
Type: Automated
Style: Horizontal Mount
Part Number: 12035G01 Rev. 11
Serial Number: 17764
Operating Range: -0.1 to -1.8" / -3 to -47 mm H2O
Accuracy to Set Point: +/- 0.04" / +/- 1 mm H2O
Pyrogenic Process: +/- 0.08" / +/- 2mm H2O
Process Flow Rate: 0.01 to 1.05 SCFM / 0.3 to 30 SLM
Minimum House Exhaust: 0.4" / 10 mm H2O more negative than set point.
Maximum House Exhaust: -5" / -125 mm H2O

Additional Unit's Serial Number Tag Reads:
Product: Supervisor
Part Number: 12000G01 Rev. 04
Serial Number: 17472
Power Requirements: +15 V to +24 VDC, 500 mA / -15V to -24VDC, 50 mA
Set Point Control Types:
# 0 to 5 Volt Analog
# RS 422/485 Serial Interface (there is a switch to choose)
# Stand alone using operator keypad

The unit is configured with parameters for a Sentry 1510 NEG. 0-2"

General Description:
The SENTRY 1510 controls pressure in atmospheric diffusion furnaces and other atmospheric process chambers improving process repeatability and reducing contamination. Through its rapid response to fluctuations, the production-proven SENTRY 1510 prevents backstreaming of contamination from house exhaust and provides a stable process environment even with widely fluctuating house exhaust or gas flows. The sealed system contains HCl fumes, improving worker safety.

Features:
# Sealed system
# Air-flow regulation with millisecond response time
# Automatic set point control
# Analog or digital host communication
# Production-proven

Benefits:
For Diffusion/Oxidation:
# Enables thinner oxide control
# Controls contamination protection from backstreaming
# Improves process repeatability
# Saves energy

Primary Applications
# Diffusion
# Oxidation