Posted by:

Location:

Arizona

Ad Status:

New!

Manufacturer:

Type:

Model:

Year (or range of years):

Condition:

Price (in US dollars):

Quantity:

Type of Seller:

Description:

NEW Brooks Automation / Progressive Technologies SENTRY 1510 Manual Process Pressure Control System


Main Unit's Serial Number Tag Reads (The one with the silver-colored hose):
Product: Sentry 1510
Type: Automated
Style: Horizontal Mount
Part Number: 12035G01 Rev. 11
Serial Number: 17764
Operating Range: -0.1 to -1.8" / -3 to -47 mm H2O
Accuracy to Set Point: +/- 0.04" / +/- 1 mm H2O
Pyrogenic Process: +/- 0.08" / +/- 2mm H2O
Process Flow Rate: 0.01 to 1.05 SCFM / 0.3 to 30 SLM
Minimum House Exhaust: 0.4" / 10 mm H2O more negative than set point.
Maximum House Exhaust: -5" / -125 mm H2O

Additional Unit's Serial Number Tag Reads:
Product: Supervisor
Part Number: 12000G01 Rev. 04
Serial Number: 17472
Power Requirements: +15 V to +24 VDC, 500 mA / -15V to -24VDC, 50 mA
Set Point Control Types:
# 0 to 5 Volt Analog

# RS 422/485 Serial Interface (there is a switch to choose)

# Stand alone using operator keypad

The unit is configured with parameters for a Sentry 1510 NEG. 0-2"

General Description:
The Sentry 1510 Manual Process Pressure Control System adds a new level of control to processing chambers running at atmospheric pressure, such as RTP and epitaxy, and atmospheric pre-load chambers. Pressure control improves process repeatability and minimizes contamination, two critical areas for today?s semiconductor processes. Operating with a single moving part, the Manual Sentry 1510 responds instantly to changes such as a chamber-opening event. For applications with a single set point requirement, the Manual Sentry 1510 provides superior pressure control at minimal cost.

The SENTRY 1510 controls pressure in atmospheric vertical diffusion furnaces. Controling pressure in thermal oxidation and diffusion improves process repeatability by over 27%. By optimizing the process pressure it is also possible to extend the usable load size by 50%. The rapid response of the SENTRY 1510 provides a stable process environment with widely fluctuating house exhaust or gas flows. This environment also provides containment for HCI fumes, making a safer work place.

Features:
# Air-flow regulation with millisecond response time

# Single moving part for high reliability

# Fail-safe operation

Benefits:
For RTP/Epitaxy:
# Controls contamination through prevention of backstreaming

# Improves process repeatability

# Reduces edge effects

# Saves energy

# For preload chambers: Controls contamination

# Saves energy

Primary Applications
# RTP

# Epitaxy

# Preload chambers