On-Board Waterpumps:
On-Board Waterpumps are high performance vacuum pumps, which increase water vapor pumping speed, providing substantially improved system configurations to fit any application. And they provide the field-proven reliability, the process flexibility, and the advanced productivity and performance of CTI-Cryogenics' On-Board family of high vacuum pumps.
Clean Operation:
On-Board Waterpumps use closed-cycle helium refrigeration to cool the pumping surface. There are no cold, dripping refrigerant lines - lines that can be potentional sources of refrigerant or vacuum leaks.
Small Footprint:
Refrigeration takes place at the pump, so the compressor can be located remotely instead of consuming valuable space near the processing system. And since water vapor is selectively pumped, an expensive gate valve is not required.
Inline Configuration:
For installation "in series" with a turbopump or a diffusion pump to increase water vapor pumping speed, or as a high-conductance alternative to a cooled baffle.
In Situ Designs:
For installation in process chambers, transfer chambers, or load locks. Provides maximum water vapor pumping speed through a large surface area.
Appendage Configuration:
For installation in process chambers or load locks or as a booster pump in large chambers with high water loads. Includes fully integrated purge valve, roughing valve, and TC gauge for automatic operationg through the On-Board microprocessor.
Features:
# 50% to 75% reduction in time to base pressure
# Higher yields through reduced water vapor and lower contamination.
# Temperature control for selective water vapor pumping. No gate valve required.
# Low cost installation and operation. The compressor can be located remotely, with no cold refrigerant lines.
# Compatibility with other On-Board pumps including common user interface, compressor, and communications protocol.
Specifications:
Pump Size:
ISO Flange: 7" (178 mm)
Conductance (N2, Inline Configuration): 1,000 l/s
Water Speed: For in situ designs, the water vapor pumping speed is proportional to cryopanel front surface area at 96 liters/sec/in2. For example, 14,400 l/s can be achieved with a 10" by 15" panel.
Company: MHz Electronics, Inc. Contact Name: Michael Finkelstein Status:Premium Member
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Ad Number: 88524
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