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NEW in the Box, Ebara ET300WS-A Anticorrosion Turbomolecular Pump for Applied Materials Centura Metal Etch R2 Chamber, Part Number: 3620-01409
Quantity available, only 1 sold in the auction. Rebuilt units available as well. These are old stock that we are clearing out.
The Main Unit's Serial Number Tag Reads:
Model Number: ET300WS-A
Service: Type 1
Part Number: AET08-1016
Serial Number: ZB070
Date: 2001
Rotation Speed: 48,000 min-1
Weight: 15 kg.
Power Requirements: 200 ~ 240 V
Applied Material's (AMAT) Information:
Part Number: 3620-01409
Description: Pump, Turbomolecular Pump, Heated Body
For: Centura Metal Etch, R2 Chamber
Accessories Listed (I Did not Open the Bag to Verify All Components):
# Center Ring with O-Ring, ISO100
# LF Clamp (Qty. 4)
# Valve (For N2 Purge)
# Solenoid Valve, 2-Way Type, NPT 1/4"
# Male Connector B, NPT 1/4" (Qty. 2)
# Coupling (For N2 Purge)
# Union Elbow (For N2 Purge)
# Flexible Tube (For N2 Purge)
# VCR Gasket (For N2 Purge) (Qty. 5)
Description:
EBARA's Wide-Range Type Turbomolecular Pump ET-W Series features the five-axis magnetic bearing and wide pressure range giving a clean vacuum environment.
The ET-W Series has a large allowable backpressure (max. 3 Torr) enables simplification of foreline exhaust system. Anticorrosion models provide superior durability to all reactive gasses. The temperature controlled models provide less build-up of chemicals.
ET-W Series provides a range of turbo pumps with pumping speed of N2 from 300 to 1600 L/s.
EBARA's turbomolecular pumps offer full magnetic levitation, which provides for a clean, reliable vacuum for today's high technology environments. The ET Series features a five axis magnetic bearing and tuning free half rack controllers. The ET Series offers two major types of turbomolecular pumps, high compression, ET-H Series, and a wide range corrosion resistant, ET-WS Series.
The ET-WS Series also offers a temperature-controlled model, ET-WS (-A), turbo for etching applications.
Specifications:
Flange:
Inlet: VG 100
Outlet: NW 25
Pumping Speed: 270 N2 l/s
Maximum Compression Ratio:
N2: > 109
H2: 7 x 103
Ultimate Pressure: < 10-6 Torr
Allowable Outlet Pressure: 400 Pa (3 Torr)
Revolution Speed: 48,000 RPM
Run-Up Time: 6 Minutes
Installation Position: Any
Vibration Level: < 0.01 µm o-p
Pump Bake Out Temperature: 100°C max.
Bearing System: 5-axis magnetic bearing
Cooling System: Water
Cooling Water Flow Rate: > 2 l/min.
N2 Gas Throughput for Purging: 85 Pa-l/sec (50 sccm)
Weight: 15 kg. - does not include packaging for shipping.
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