Airco Temescal BJD-1800 E-Beam Evaporator

Posted by:

levyr

Location:

New Jersey

Ad Status:

SOLD

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Description:

Airco Temescal BJD-1800 Evaporator system features an 18-inch-diameter by 9-inch-high stainless steel substrate chamber that is hinged and spring-loaded. Pumping module has a speed of 1000 liters/second at the high vacuum and more than 800
liters/second at the evaporation chamber. System is all stainless steel to achieve highest vacuum integrity and easy cleaning. All internal surfaces exposed to high vacuum are #4 finish. In addition, all dynamic seals are bellows-sealed, and o-rings are used only as static seals.

Additional Specs:

•CV-8 power supply
•Six 15cc hearths
•TFI Telemark 270 series gun with XYS sweep control
•Cryopump
•Granville Phillips ionization gauge
•Inficon crystal monitor
•Fixed 8" substrate carrier
•Rotary substrate motor driving system
•Planetary dome
•MKS gas flow controller

For additional photos and specs, please refer to our website:

www.photonicmicrodevices.com