Sputtering & Evaporation

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Varian 3190

:405/2

Posted by:	Soletech
Location:	California
Ad Status:	Active

Manufacturer:	Varian
Type:	Sputtering System
Model:	3190
Year (or range of years):
Condition:	Good
Price (in US dollars):	USD
Quantity:	2
Type of Seller:	Dealer Owner

Description:
Load locked single wafer sputter, cassette to cassette vertically mounted for sideways sputter • Currently configured for 5 Inch. • 3 Sputter Stations (Conmag I Sources) • Substrate heaters • 1 RF Etching Station • MKS 250 Controllers • FLUKE 1722A Controllers • Wafer Process Controller • Wafer Loader Controller • Vacuum System Controller • 845 Ionization Gauge Controller • RF Matching Controller • Cassette Motor Controller • Wide Range Thin Film Monitor • Remote monitor • Interlock & Control chassis • Remote reset panel (not in 2nd system) • Temperature monitor • Eurotherm gauge controllers • CTI8 cryo pump and SCW compressor • 12KW Power Supplies • RF Power Supply • Ferrofluidic Coaxial Feedthru • Mechanical vacuum pump • HP3438A digital multimeter ( Fluke 8840A in 2nd m/c)

Company: SOLETECH Corp.
Contact Name: Mukesh Lad
Status: Premium Member

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Ad Number: 282657

About this Varian 3190 listing

- This is a for sale classified ad for a used, surplus or second hand Varian 3190 equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this listing or view this user's profile for detailed contact info.