Applied Materials 5200 Centura PVD Tool | used Applied Materials Sputtering & Evaporation, refurbished Applied Materials Sputtering & Evaporation for sale

Cleaned and Partially Refurbed and Ready to go.

S/N: 2552
System Configuration:
Wafer size : 200mm
Robotics System : VHP Robot
Software Revision <TJ3D>
DC Generators: MDX LI2M xl
DC Generators : MDX Ll2 x 2
Cryo Compressors: 8510 x 2
Chiller : Neslab x I
Main AC Controller : Yes
System Controller : Yes
Full System Cabling : Yes
Chambers Configurations:
Chamber A: Wide Body Ti/TiN
Process Type; Clamped Ti/TIN
Wafer Chuck: Standard Heater
UHV Pump Options: 3Ph OR Cryo
Chamber Body: WB (0040-20195)
Source Assy: 12.9?
Source Adaptor Type: 0020-23042
Magnet Part Number: 0010-20223
Power Supply: AR MDX L12
Cryo Gate Valve: 3 PGV
Cryo Restrictor: Standard
Shutter Option: No
Chamber B: Standard Body AICu Clamp
Process Type: AICuWafer Chuck: Standard Heater
UHV Pump Options: 3Ph OB Cryo
Chamber Body: Standard Body
Source Assy: 12.9?
Source Adaptor Type: 0020-23042
Magnet Part Number; 0010-20225
Power Supply: AR MDX LI2
Cryo Gate Valve: 2 POV
Cryo Restrictor: Standard
Shutter Option: Nn
Chamber C: NA

Chamber D: PCII
With Comdel CPS-100l/13.56Mhz bias RF Generator &
LF-IOAI400KHz RE Generator & Leybold TMP 361C Turbo Pump
Chamber E: Orienter/Degas(IR lamp heated)
Chamber F: Blank
System Saftey Equipment Configuration
EMO Switch Type: Turn to Release EMO
EMO Guard Ping: Yes
Loadlock Configuration
Loadlock Type: Narrow Body
Indexer and Handler Type: Stepper Control with Standard Indexer
Wafer Mapping: Standard
Loadlock Vent: Standard Vent
Wafer Out of slot detector: No
Buffer Configuration
Buffer Robot Type: VHF
System Status Tower Configuration
Signal Status Indicator: Not Available
Gas Delivery Options
Gas Delivery Type; AMAT Spec.
Proc, Heater & Vent Valves: Veriflo lORa
Gasline Fittings: Cajon
Process & Heater Gasline Filters: PALL
Loadlock and Mainframe Filters: PALL
MFC Type:Tylan AERA 780C
RF Generators: CPS 10015 13.56MHz x 1 & RFPP 400 KHz RF Generator