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AMAT Centura 5200 HTF RTO/PolySi/Clean

:1394/0

Posted by:	levyr
Location:	New Jersey
Ad Status:	SOLD

Manufacturer:	Applied Materials
Type:	Centura 5200
Model:	HTF
Year (or range of years):	1998
Condition:	Excellent
Price (in US dollars):	USD
Quantity:	1
Type of Seller:	Dealer Owner

Description:
Centura 5200 HTF system (200mm)configured as follows: •CH-A Poly HT, Polysilicon deposition chamber doped and undoped, 200mm, 450c - 1200c temp range, reduced pressure •CH-C RTP; version MOD2 rapid thermal oxide deposition and rapid thermal anneal (O2 and N2) 450C-1100C range, reduced pressure •CH-D HF clean chamber •CH-F; Centura centerfinder •Gaspanel; Centura HT gas panel •Remote frame; Centura remote frame/VME controller •Loadlocks; standard wide body •Four vacuum pumps: loadlock, X-fer chamber, Poly chamber and RTP chamber •20 GPM Bay Voltex heat exchanger for the RTP system •BOC TCS-1 Effluent scrubber For additional photos, please refer to our website: www.photonicmicrodevices.com

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About this Applied Materials HTF listing

- This is a for sale classified ad for a used, surplus or second hand Applied Materials HTF equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this listing or view this user's profile for detailed contact info.