Heatpulse is a Registered Trademark of AG Associates.AG Heatpulse 4100 Series are single-wafer, cassette-to-cassette rapid thermal processors, capable of processing in inert or corrosive ambient. The unit is built for the production environment. AG4100 is a rapid thermal processor which uses high-intensity, visible radiation to heat single wafer for short periods at precisely controlled temperatures.
High-intensity visible radiation heats wafers for short periods. Fast heating and cooling rates unobtainable in conventional technologies.
Consistent wafer-to-wafer process cycle repeatability.
Elimination of external contamination.
Small footprint and energy efficiency.
Wafer Size 4”, 5” and 6” .
Robot control ability. (Equip Tech. robot with one arm)
Single Wafer Process.
Gold coated aluminum chamber with water cooling
Radiation heating lamp module
4-gas channel with 4 MFCs
Cassette to cassette wafer handling
Multiple cycle processing capability
Steady Temp Range: 600°C to 1250°C for pyrometer sensor, 100°C to 600°C for Thermocouple.
Steady state process time 0 to 30000 sec programmable.
Temp Ramp-up Speed: 10°C to 120°C for wafer. Programmable
Ramp down speed 10°C - 150°C for wafer
Robot wafer cycling: 80 Wafers/Hr.
AG 4100 RTA RTP is a versatile tool, which is useful for many applications:
• Ion Implant Activation
• Polysilicon Annealing
• Oxide Reflow
• Silicide Formation
• Contact Alloying
• Oxidation and Nitridation
• GaAs Processing
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Rapid thermal processing (or RTP) refers to a semiconductor manufacturing process which heats silicon wafers to high temperatures (up to 1200 C or greater) on a timescale of several seconds or less. The wafers must be brought down (temperature) slow enough however, so they do not break due to thermal shock..Such rapid heating rates are attained by high intensity lamps process. These processes are used for a wide variety of applications in semiconductor manufacturing including dopant activation, thermal oxidation, metal reflow and chemical vapor deposition.
AG Associates Heatpulse is one of the most famous RTP equipment manufacturers. Many Integrated Chip companies, R&D centers, Institutes all over the world have been using AG Heatpulse Systems.
Allwin21 Corp can provide the following refurbished RTP equipment
AG Heatpulse 4100S
AG Heatpulse 4108
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