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Rapid thermal processing (or RTP) refers to a semiconductor manufacturing process which heats silicon wafers to high temperatures (up to 1200 C or greater) on a timescale of several seconds or less. The wafers must be brought down (temperature) slow enough however, so they do not break due to thermal shock..Such rapid heating rates are attained by high intensity lamps process. These processes are used for a wide variety of applications in semiconductor manufacturing including dopant activation, thermal oxidation, metal reflow and chemical vapor deposition.
Rapid thermal anneal (RTA) is a process used in semiconductor device fabrication which consists of heating a single wafer at a time in order to affect its electrical properties. Unique heat treatments are designed for different effects. Wafers can be heated in order to activate dopants, change film-to-film or film-to-wafer substrate interfaces, densify deposited films, change states of grown films, repair damage from ion implantation, move dopants or drive dopants from one film into another or from a film into the wafer substrate. Rapid thermal anneals are performed by equipment that heats a single wafer at a time using lamp based heating that a wafer is brought near. Unlike furnace anneals they are short in duration, processing each wafer in several minutes. Rapid thermal anneal is a subset of processes called Rapid Thermal Process (RTP).
AG Associates Heatpulse is one of the most famous RTP equipment manufacturers. Many Integrated Chip companies, R&D centers, Institutes all over the world have been using AG Heatpulse Systems.
The following is a list of AG Heatpulse products:
AG Heatpulse 210
AG Heatpulse 410
AG Heatpulse 610
AG Heatpulse 2100
AG Heatpulse 4100
AG Heatpulse 4100S
AG Heatpulse 4108
AG Heatpulse 8108
AG Heatpulse 8800
Allwin21 has already bought the exclusive manufacture license for AG Heatpulse 610,AG Heatpulse 410,AG Heatpulse 210.Allwin21 is making new AG 610 machine with her AW Control Software and Superior Temperature Control Technology. The brand new system is named of AccuThermo AW 610.Allwin21 Corp is providing the exclusive licensed technical service for all the AG Heatpulse 210/410/610 systems all over the world.
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