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Steag AST SHS2800RTP

Statistics: views/answers:172/1
Posted by:
intechsys
Location:
Asia and Pacific - South Korea
Ad Status:
Active

Manufacturer:
Type:
Model:
SHS2800
Year (or range of years):
1996
Condition:
Excellent
Price (in US dollars):
ASK USD
Quantity:
1
Type of Seller:
Dealer Owner

Description:
Model
AST SHS2800
Gases
N2, O2, Are, N2O

S/N
96070247
MFC
Brooks

Process
RTP
Controller Type
Model 201

Vintage
1996
Heater
38 lamps type

Wafer Size
8inch
Robot(Wafer TR)
PRI

Load Type
2 cassettes Run
Flat Aligner
Equip Technology

Process Temp.
1100 ℃
Dummy Station
Yes

Voltage
208V 60Hz 3P +PE, 125A


Company: Intech Systems Inc.
Contact Name: David Julio Kim
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Member Details

Ad Number: 83141
About this Steag AST SHS2800 listing - This is a for sale classified ad for a used, surplus or second hand Steag AST SHS2800 equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this Steag AST SHS2800 listing or view this user's member profile for detailed contact info.