Manufacturer: |
Verteq / Akrion |
Type: |
200mm (8") SRD (Spin, Rinser, Dryer) |
Model: |
1800-6AL |
Year (or range of years): |
1997 |
Condition: |
Excellent |
Price (in US dollars): |
USD |
Quantity: |
1 |
Type of Seller: |
Dealer Owner |
Description:
|
| |
|
Verteq SuperClean 1800-6AL Spin Rinser Dryer System (SRD)
The Unit's Serial Number Tag Reads:
Model Number: 1800-6AL
Serial Number: 31499A S.O. 31499
Manufacture Date: 4/97
Power Requirements: 120 V, 50/60 Hz, 15 A
The Rotor Says:
Part Number: 1071643-1
Serial Number: 1762
Type: A192-81M H-BAR-IN
SuperClean 1800-6:
The SuperClean 1800-6 is a state-of-the-art, single carrier, 200mm, front-loading spin rinser dryer. More than a mere upsizing of previous technology, the 1800-6 represents a ground up effort incorporating all that VERTEQ has learned about rinser drying processing, and the demanding needs for reliability and serviceability in today's volume production fabs.
The 1800-6 process bowl is deep drawn to eliminate as many welds as possible, then electropolished to provide a corrosion resistant surface. The interior is meticulously detailed to provide an ultrasmooth surface with excellent rinsing characteristics to prevent particle trapping. The bowl can also be polished to an Ra-10 mirror-like finish with stringent specifications regarding surface anomalies for enhanced cleanliness.
To complement the cleanliness of the bowl, the 1800-6 features all-Teflon DI water plumbing with specially-prepared high pressure valves, and a continuous flow loop to eliminate dead legs. Likewise, the nitrogen plumbing features ultrapure materials and an inline 0.05µm filter. Lastly, a static eliminator is provided to prevent static buildup which can cause particles to reattach to substrate surfaces.
The system features multi-step, multi-recipe editing with user-programmable control over several processing options. The controller governs a full complement of safety features, has built-in diagnostics, and has been successfully ESD tested beyond a "Level 4 Severity" of IEC 801-2 specifications to ensure the system is well protected and very reliable.
The 1800-6 has been designed to operate with full or partial loads in manual or automated wet process stations, and in free-standing cabinets.
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