Brooks Automation Marathon 600 Cluser Tool / Vacuum Transport System with a MagnaTran 7 Robot
This unit is believed to be new, old stock. As you can see the robot still has the shipping bracket installed and we personally pulled this out of the factory crate (the crate had to be tossed because it was too old).
The Robot's Serial Number Tag Reads:
Part Number: 002-1500-02
Serial Number: 9709-2452
CE Marked: Yes
The Robot's Power Supply's Serial Number Tag Reads:
Model Number: 001-6605-16
Revision: 4
Date of Manufacture: 10/18/97
The Teaching Pendant's Serial Number Tag Reads:
Part Number: 001-1984
Serial Number: HH71267
Description:
The Brooks Automation Marathon Cluster Tools are SEMI/MESC compatible Vacuum Transport Systems designed to provide wafer transport between multiple Process Modules in high vacuum environments. These systems employ either a Brooks Automation VacuTran 5 or MultiTran 5 (this unit has a MagnaTran 7) Robot housed in a multi-sided central vacuum chamber to transfer wafers among the various facets of the chamber. The Marathon Cluster Tools typically included (not present) two Brooks Automation VCE-2-O Cassette Elevators (a "left" and a "right") coupled to the central vacuum chamber. Additional Cassette Elevators or Process Modules may be connected to the remaining facets of the central chamber. The Marathon Cluster Tool control system sens and receives signals to coordinate activities in the chamber, the vacuum system, and all Brooks Automation Cassette and Process Modules attached to the chamber.
The Marathon Cluser Tool provides all the wafer handling capabilities required to transfer wafers into the ultra clean, high vacuum environment within the cluster and to transport wafers among the Process Modules. The high-vacuum environment is maintained by the by the Cluster Tool in conjuction with the Cassette Module(s) and Process Modules connected to the chamber.
The central chambers are available in the 4, 5, 6, 7, and 8-sided versions (this one is a 6 sided version). The Cluster Tool accomodates 3-in, 100-mm, 125-mm, 150-mm, and 200-mm wafers (This unit looks like it may be able to handle 300-mm too) in SEMI standard cassettes. No significant mechanical or structural modifications are required to reconfigure the system in the field to accomodate any of these different wafer sizes.
To provide convenient access to minimize facility floor space requirements, the Marathon Cluster Tool packages all components into three units, a transport system unit, a 19-inch wide electronics bay, and a 19-inch wide backing pump bay (only what you see is included).
Company: MHz Electronics, Inc. Contact Name: Michael Finkelstein Status: Premium Member
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About this Brooks Automation / ASM Marathon 600 w/MagnaTran 7 listing
- This is a for sale classified ad for a used, surplus or second hand Brooks Automation / ASM Marathon 600 w/MagnaTran 7 equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this listing or view this user's profile for detailed contact info.
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