PROCESS FLOW SCHEMATIC IS:-
STATION 0 LOADER 1 boat x 3 pieces
STATION 1 CASSETTE CLEAN
STATION 2 SC1 MEGASONIC
STATION 3 HOT AND COLD DIW
STATION 4 COLD DIW
STATION 5 VAPOR DRYER
STATION 6 UNLOADER
Automatically Processing of 8" Wafers
-2 ROBOTS
-CE MARKED
-SECS GEM COMPATIBLE
-DEINSTALL REPORT AVAILABLE
-USED WITH H2O2 AND NH4OH
-4 Process Tanks and Boat Carrier Robot
-Process direction from Left to Right
-Boat for 8" KM-82 (KAKIZAKI)
-CABINEX EN FIRE SUPRESSION system
-FINE-SONIC VIBARATOR SYSTEM
-FOXBORO 873RS ELECTROCHEMICAL ANALYSIS SYSTEM FOR RESISTIVITY MEASUREMENT.
-IWAKI FA-40E BELLOWS PUMPS WITH IWAKI SC1 CONTROLLER.
-KOMATSU E3X1 SERIES CHEMICAL CIRCULATOR.
-OMRON E5AX DIGITAL temperature controller
-CONSISTS OF MAIN FRAME,V/D FRAME,MEGASONIC SC1 QTZ TANK,QDR QTZ TANK,F/R QTZ TANK
-WAFER LOAD 52 X 8 INCH WAFERS IN ONE BATCH
Dims: 4900L X 1900W X 2480H
-LIQUID LEAK DETECTOR AT BOTTOM OF HOOD
-DI SPRAY GUN
-N2 GUN AT UNLOADER
-DIW PIPING WITH NO DEAD LEGS
ALL MANUALS INCLUDED, OPERATIONAL, MAINTENANCE, SCHEMATICS, ELECTRICAL INTERCONNECT AND SUPPLIER MANUALS.
Company: SDI Semiconductor Instruments Group Contact Name: Stephen Howe Status:Premium Member
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Ad Number: 135013
About this Toho Kasei Custom listing - This is a for sale classified ad for a used, surplus or second hand Toho Kasei Custom equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this Toho Kasei Custom listing or view this user's member profile for detailed contact info.
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