Novellus Sabre/Sabre-xT Copper Electrofill System. It has 3 electroplating cells and 3 rinse cells. The tool handles 200mm wafer and throughput around 70 wafers/hour. The tank volume is 100 liters and has 3 additive feeds.
Located in North America.
Can be inspected by appointment.
Company: SDI-Fabsurplus LLC Contact Name: Stephen Howe Status:Premium Member
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Ad Number: 167949
About this Novellus Sabre XT listing - This is a for sale classified ad for a used, surplus or second hand Novellus Sabre XT equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this Novellus Sabre XT listing or view this user's member profile for detailed contact info.
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