The Hitachi SCDS is designed for processing PFC gases used in semiconductor abrication. The system features a 60l/min gas throughput and decomposition rates of over 99.4% for CF4, C2F6, CHF3, C3F8, C4F8, NF3, CO and SF6.
The Hitachi SCDS offers superior cost of ownership
versus Capture/Re-cycle; Combustion; or Chemical
Conversion technologies since it uses little electricity,
only 1 gpm of water, and has a catalyst lifetime of more
than 4,600 hours. The SCDS-60 has a footprint of only
37" Wx19.5 " Dx77"H. and is fully S2-93 and CE compliant.
For additional photos and specs, please visit our website:
www.photonicmicrodevices.com
Company: Photonic Microdevices Inc. Contact Name: Roland Levy Status:Premium Member
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Ad Number: 159593
About this Hitachi CD-60 listing - This is a for sale classified ad for a used, surplus or second hand Hitachi CD-60 equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this Hitachi CD-60 listing or view this user's member profile for detailed contact info.
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