The Hitachi SCDS is designed for processing PFC gases used in semiconductor abrication. The system features a 60l/min gas throughput and decomposition rates of over 99.4% for CF4, C2F6, CHF3, C3F8, C4F8, NF3, CO and SF6.
The Hitachi SCDS offers superior cost of ownership
versus Capture/Re-cycle; Combustion; or Chemical
Conversion technologies since it uses little electricity,
only 1 gpm of water, and has a catalyst lifetime of more
than 4,600 hours. The SCDS-60 has a footprint of only
37" Wx19.5 " Dx77"H. and is fully S2-93 and CE compliant.
For additional photos and specs, please visit our website:
www.photonicmicrodevices.com
Company: Photonic Microdevices Inc. Contact Name: Roland Levy Status: Premium Member
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About this Hitachi CD-60 listing
- This is a for sale classified ad for a used, surplus or second hand Hitachi CD-60 equipment. It is posted by one of our members. To contact the seller of this item please click the WebMail icon at the bottom of this listing or view this user's profile for detailed contact info.
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