Allwin21 is the exclusive licenced manufacturer for AG Heatpulse 610. Allwin21 is manufacturing the AccuThermo AW-410,AccuThermo AW-610,AccuThermo AW 810,originally the AG Heatpulse 610.The AccuThermo AW-410,AccuThermo AW-610,AccuThermo AW 810 have innovative software and more advanced temperature control technologies.
AccuThermo AW 610’s key features include:
Wafer Size:2 to 6 inch.
Quartz liners for BPSG/PSG processing with special Quartz Tube instead of the standard Quartz Tube(Option)
Advanced ERP Pyrometer for precise high temperature measurement (See Detail ERP Pyrometer)
Add timer watch for the oven safety issue (the original has no safety interlock for the computer locks up, chamber would be burned if the computer locks up when process running).
The new software with power summary function to detect either lamp failure or sensor failure
Manual Operation
Use Sumpower as a parameter to control the uniformity of the wafer.
Closed-loop temperature control with pyrometer or thermocouple temperature sensing.
Precise time-temperature profiles tailored to suit specific process requirements.
High-intensity visible radiation heats wafers for short periods. Fast heating and cooling rates unobtainable in conventional technologies.
Consistent wafer-to-wafer process cycle repeatability.
Elimination of external contamination.
Small footprint and energy efficiency.
Software calibration and easy to be done.
More functions and I/O hardware “exposed” for easier maintenance and trouble shooting.
It is easy to edit recipe with GUI and graph display.
Save all process data on the computer hard disk.
A/D and D/A precision is 14 to 16 bits.
Detect in process and with color curve displayed on the screen.
Lamp damage detect in process.
Sensor status detect function.
On line help function
Typical Application Area
v Chip Maufacture
V Compound Industry：GaAs, GaN, GaP, GaInP,InP and SiC
v Optronics：Planar optical waveguides,LASERs, LEDs and VCSELs
v Biomedical
v MEMS
v Nanotechnology
V Solar Cell
Company: Allwin21 Contact Name: Peter Chen Status:Premium Member
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